10/24/2010	1:06:05 PM	Recipe started at 1:06 PM
10/24/2010	1:06:05 PM	Helium valve closed
10/24/2010	1:06:05 PM	BCl3 valve closed
10/24/2010	1:06:05 PM	PH3 valve closed
10/24/2010	1:06:05 PM	SiCl4 pre valve closed
10/24/2010	1:06:05 PM	SiCl4 post valve closed
10/24/2010	1:06:05 PM	Main Vac valve closed
10/24/2010	1:06:05 PM	Bypass valve closed
10/24/2010	1:06:05 PM	Bubbler valve closed
10/24/2010	1:06:05 PM	H2 valve opened
10/24/2010	1:06:05 PM	Helium MFC set to  0.000000
10/24/2010	1:06:05 PM	H2 MFC set to  500.000000
10/24/2010	1:06:05 PM	BCl3 MFC set to  0.000000
10/24/2010	1:06:05 PM	PHl3 MFC set to  0.000000
10/24/2010	1:06:05 PM	SiCl4 MFC set to  0.000000
10/24/2010	1:06:05 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	1:06:05 PM	Tube furnace set to 1000
10/24/2010	1:07:27 PM	Helium valve closed
10/24/2010	1:07:27 PM	BCl3 valve closed
10/24/2010	1:07:27 PM	PH3 valve closed
10/24/2010	1:07:27 PM	SiCl4 pre valve closed
10/24/2010	1:07:27 PM	SiCl4 post valve closed
10/24/2010	1:07:27 PM	Main Vac valve closed
10/24/2010	1:07:27 PM	Bypass valve closed
10/24/2010	1:07:27 PM	H2 valve opened
10/24/2010	1:07:27 PM	Bubbler valve opened
10/24/2010	1:07:27 PM	Helium MFC set to  0.000000
10/24/2010	1:07:27 PM	H2 MFC set to  500.000000
10/24/2010	1:07:27 PM	BCl3 MFC set to  0.000000
10/24/2010	1:07:27 PM	PHl3 MFC set to  0.000000
10/24/2010	1:07:27 PM	SiCl4 MFC set to  0.000000
10/24/2010	1:07:27 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	1:07:27 PM	Tube furnace set to 1000
10/24/2010	1:27:27 PM	Helium valve closed
10/24/2010	1:27:27 PM	PH3 valve closed
10/24/2010	1:27:27 PM	Main Vac valve closed
10/24/2010	1:27:27 PM	Bypass valve closed
10/24/2010	1:27:27 PM	H2 valve opened
10/24/2010	1:27:27 PM	BCl3 valve opened
10/24/2010	1:27:27 PM	SiCl4 pre valve opened
10/24/2010	1:27:27 PM	SiCl4 post valve opened
10/24/2010	1:27:27 PM	Bubbler valve opened
10/24/2010	1:27:27 PM	Helium MFC set to  0.000000
10/24/2010	1:27:27 PM	H2 MFC set to  500.000000
10/24/2010	1:27:27 PM	BCl3 MFC set to  12.000000
10/24/2010	1:27:27 PM	PHl3 MFC set to  0.000000
10/24/2010	1:27:27 PM	SiCl4 MFC set to  50.000000
10/24/2010	1:27:27 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	1:27:27 PM	Tube furnace set to 1000
10/24/2010	1:40:47 PM	Helium valve closed
10/24/2010	1:40:47 PM	BCl3 valve closed
10/24/2010	1:40:47 PM	PH3 valve closed
10/24/2010	1:40:47 PM	SiCl4 pre valve closed
10/24/2010	1:40:47 PM	SiCl4 post valve closed
10/24/2010	1:40:47 PM	Main Vac valve closed
10/24/2010	1:40:47 PM	Bypass valve closed
10/24/2010	1:40:47 PM	H2 valve opened
10/24/2010	1:40:47 PM	Bubbler valve opened
10/24/2010	1:40:47 PM	Helium MFC set to  0.000000
10/24/2010	1:40:47 PM	H2 MFC set to  500.000000
10/24/2010	1:40:47 PM	BCl3 MFC set to  0.000000
10/24/2010	1:40:47 PM	PHl3 MFC set to  0.000000
10/24/2010	1:40:47 PM	SiCl4 MFC set to  0.000000
10/24/2010	1:40:47 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	1:40:48 PM	Tube furnace set to 750
10/24/2010	2:00:48 PM	H2 valve closed
10/24/2010	2:00:48 PM	BCl3 valve closed
10/24/2010	2:00:48 PM	PH3 valve closed
10/24/2010	2:00:48 PM	SiCl4 pre valve closed
10/24/2010	2:00:48 PM	SiCl4 post valve closed
10/24/2010	2:00:48 PM	Main Vac valve closed
10/24/2010	2:00:48 PM	Bypass valve closed
10/24/2010	2:00:48 PM	Helium valve opened
10/24/2010	2:00:48 PM	Bubbler valve opened
10/24/2010	2:00:48 PM	Helium MFC set to  500.000000
10/24/2010	2:00:48 PM	H2 MFC set to  0.000000
10/24/2010	2:00:48 PM	BCl3 MFC set to  0.000000
10/24/2010	2:00:48 PM	PHl3 MFC set to  0.000000
10/24/2010	2:00:48 PM	SiCl4 MFC set to  0.000000
10/24/2010	2:00:48 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	2:00:48 PM	Tube furnace set to 0
10/24/2010	2:08:12 PM	Run aborted at 2:08 PM
10/24/2010	2:08:12 PM	Helium valve closed
10/24/2010	2:08:12 PM	H2 valve closed
10/24/2010	2:08:12 PM	BCl3 valve closed
10/24/2010	2:08:12 PM	PH3 valve closed
10/24/2010	2:08:12 PM	SiCl4 pre valve closed
10/24/2010	2:08:12 PM	SiCl4 post valve closed
10/24/2010	2:08:12 PM	Bypass valve closed
10/24/2010	2:08:12 PM	Main Vac valve closed
10/24/2010	2:08:12 PM	Bubbler valve closed
10/24/2010	2:08:12 PM	Helium MFC set to  0.000000
10/24/2010	2:08:12 PM	H2 MFC set to  0.000000
10/24/2010	2:08:12 PM	BCl3 MFC set to  0.000000
10/24/2010	2:08:12 PM	PHl3 MFC set to  0.000000
10/24/2010	2:08:12 PM	SiCl4 MFC set to  0.000000
10/24/2010	2:08:12 PM	Tube furnace set to 0
10/24/2010	2:08:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/24/2010	2:08:13 PM	Recipe started at 2:08 PM
10/24/2010	2:08:13 PM	H2 valve closed
10/24/2010	2:08:13 PM	BCl3 valve closed
10/24/2010	2:08:13 PM	PH3 valve closed
10/24/2010	2:08:13 PM	SiCl4 pre valve closed
10/24/2010	2:08:13 PM	SiCl4 post valve closed
10/24/2010	2:08:13 PM	Main Vac valve closed
10/24/2010	2:08:13 PM	Bypass valve closed
10/24/2010	2:08:13 PM	Bubbler valve closed
10/24/2010	2:08:13 PM	Helium valve opened
10/24/2010	2:08:13 PM	Helium MFC set to  500.000000
10/24/2010	2:08:13 PM	H2 MFC set to  0.000000
10/24/2010	2:08:13 PM	BCl3 MFC set to  0.000000
10/24/2010	2:08:13 PM	PHl3 MFC set to  0.000000
10/24/2010	2:08:13 PM	SiCl4 MFC set to  0.000000
10/24/2010	2:08:13 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	2:08:14 PM	Tube furnace set to 0
10/24/2010	2:08:14 PM	Helium valve closed
10/24/2010	2:08:14 PM	H2 valve closed
10/24/2010	2:08:14 PM	BCl3 valve closed
10/24/2010	2:08:14 PM	PH3 valve closed
10/24/2010	2:08:14 PM	SiCl4 pre valve closed
10/24/2010	2:08:14 PM	SiCl4 post valve closed
10/24/2010	2:08:14 PM	Main Vac valve closed
10/24/2010	2:08:14 PM	Bypass valve closed
10/24/2010	2:08:14 PM	Bubbler valve closed
10/24/2010	2:08:14 PM	Helium MFC set to  0.000000
10/24/2010	2:08:14 PM	H2 MFC set to  0.000000
10/24/2010	2:08:14 PM	BCl3 MFC set to  0.000000
10/24/2010	2:08:14 PM	PHl3 MFC set to  0.000000
10/24/2010	2:08:14 PM	SiCl4 MFC set to  0.000000
10/24/2010	2:08:14 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	2:08:14 PM	Tube furnace set to 0
10/24/2010	2:08:14 PM	Run finished at 2:08 PM
10/24/2010	2:08:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/24/2010	2:21:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/24/2010	2:21:40 PM	Recipe started at 2:21 PM
10/24/2010	2:21:40 PM	Helium valve closed
10/24/2010	2:21:40 PM	H2 valve closed
10/24/2010	2:21:40 PM	BCl3 valve closed
10/24/2010	2:21:40 PM	PH3 valve closed
10/24/2010	2:21:40 PM	SiCl4 pre valve closed
10/24/2010	2:21:40 PM	SiCl4 post valve closed
10/24/2010	2:21:40 PM	Main Vac valve closed
10/24/2010	2:21:40 PM	Bubbler valve closed
10/24/2010	2:21:40 PM	Bypass valve opened
10/24/2010	2:21:40 PM	Helium MFC set to  0.000000
10/24/2010	2:21:40 PM	H2 MFC set to  0.000000
10/24/2010	2:21:40 PM	BCl3 MFC set to  0.000000
10/24/2010	2:21:40 PM	PHl3 MFC set to  0.000000
10/24/2010	2:21:40 PM	SiCl4 MFC set to  0.000000
10/24/2010	2:21:40 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	2:21:41 PM	Tube furnace set to 0
10/24/2010	2:22:31 PM	Helium valve closed
10/24/2010	2:22:31 PM	H2 valve closed
10/24/2010	2:22:31 PM	BCl3 valve closed
10/24/2010	2:22:31 PM	PH3 valve closed
10/24/2010	2:22:31 PM	SiCl4 pre valve closed
10/24/2010	2:22:31 PM	SiCl4 post valve closed
10/24/2010	2:22:31 PM	Bubbler valve closed
10/24/2010	2:22:31 PM	Main Vac valve opened
10/24/2010	2:22:31 PM	Bypass valve opened
10/24/2010	2:22:31 PM	Helium MFC set to  0.000000
10/24/2010	2:22:31 PM	H2 MFC set to  0.000000
10/24/2010	2:22:31 PM	BCl3 MFC set to  0.000000
10/24/2010	2:22:31 PM	PHl3 MFC set to  0.000000
10/24/2010	2:22:31 PM	SiCl4 MFC set to  0.000000
10/24/2010	2:22:31 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	2:22:31 PM	Tube furnace set to 0
10/24/2010	2:22:31 PM	Run finished at 2:22 PM
10/24/2010	2:22:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/24/2010	2:22:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/24/2010	2:23:02 PM	Recipe started at 2:22 PM
10/24/2010	2:23:02 PM	Helium valve closed
10/24/2010	2:23:02 PM	H2 valve closed
10/24/2010	2:23:02 PM	BCl3 valve closed
10/24/2010	2:23:02 PM	PH3 valve closed
10/24/2010	2:23:02 PM	SiCl4 pre valve closed
10/24/2010	2:23:02 PM	SiCl4 post valve closed
10/24/2010	2:23:02 PM	Main Vac valve closed
10/24/2010	2:23:02 PM	Bubbler valve closed
10/24/2010	2:23:02 PM	Bypass valve opened
10/24/2010	2:23:02 PM	Helium MFC set to  0.000000
10/24/2010	2:23:02 PM	H2 MFC set to  0.000000
10/24/2010	2:23:02 PM	BCl3 MFC set to  0.000000
10/24/2010	2:23:02 PM	PHl3 MFC set to  0.000000
10/24/2010	2:23:02 PM	SiCl4 MFC set to  0.000000
10/24/2010	2:23:02 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	2:23:02 PM	Tube furnace set to 0
10/24/2010	2:23:02 PM	Helium valve closed
10/24/2010	2:23:02 PM	H2 valve closed
10/24/2010	2:23:02 PM	BCl3 valve closed
10/24/2010	2:23:02 PM	PH3 valve closed
10/24/2010	2:23:02 PM	SiCl4 pre valve closed
10/24/2010	2:23:02 PM	SiCl4 post valve closed
10/24/2010	2:23:02 PM	Bubbler valve closed
10/24/2010	2:23:02 PM	Main Vac valve opened
10/24/2010	2:23:02 PM	Bypass valve opened
10/24/2010	2:23:02 PM	Helium MFC set to  0.000000
10/24/2010	2:23:02 PM	H2 MFC set to  0.000000
10/24/2010	2:23:02 PM	BCl3 MFC set to  0.000000
10/24/2010	2:23:02 PM	PHl3 MFC set to  0.000000
10/24/2010	2:23:02 PM	SiCl4 MFC set to  0.000000
10/24/2010	2:23:02 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	2:23:03 PM	Tube furnace set to 0
10/24/2010	2:24:03 PM	H2 valve closed
10/24/2010	2:24:03 PM	BCl3 valve closed
10/24/2010	2:24:03 PM	PH3 valve closed
10/24/2010	2:24:03 PM	SiCl4 pre valve closed
10/24/2010	2:24:03 PM	SiCl4 post valve closed
10/24/2010	2:24:03 PM	Bubbler valve closed
10/24/2010	2:24:03 PM	Helium valve opened
10/24/2010	2:24:03 PM	Main Vac valve opened
10/24/2010	2:24:03 PM	Bypass valve opened
10/24/2010	2:24:03 PM	Helium MFC set to  100.000000
10/24/2010	2:24:03 PM	H2 MFC set to  0.000000
10/24/2010	2:24:03 PM	BCl3 MFC set to  0.000000
10/24/2010	2:24:03 PM	PHl3 MFC set to  0.000000
10/24/2010	2:24:03 PM	SiCl4 MFC set to  0.000000
10/24/2010	2:24:03 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	2:24:03 PM	Tube furnace set to 0
10/24/2010	2:25:03 PM	Helium valve closed
10/24/2010	2:25:03 PM	H2 valve closed
10/24/2010	2:25:03 PM	BCl3 valve closed
10/24/2010	2:25:03 PM	PH3 valve closed
10/24/2010	2:25:03 PM	SiCl4 pre valve closed
10/24/2010	2:25:03 PM	SiCl4 post valve closed
10/24/2010	2:25:03 PM	Bubbler valve closed
10/24/2010	2:25:03 PM	Main Vac valve opened
10/24/2010	2:25:03 PM	Bypass valve opened
10/24/2010	2:25:03 PM	Helium MFC set to  0.000000
10/24/2010	2:25:03 PM	H2 MFC set to  0.000000
10/24/2010	2:25:03 PM	BCl3 MFC set to  0.000000
10/24/2010	2:25:03 PM	PHl3 MFC set to  0.000000
10/24/2010	2:25:03 PM	SiCl4 MFC set to  0.000000
10/24/2010	2:25:03 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	2:25:03 PM	Tube furnace set to 0
10/24/2010	2:26:03 PM	H2 valve closed
10/24/2010	2:26:03 PM	BCl3 valve closed
10/24/2010	2:26:03 PM	PH3 valve closed
10/24/2010	2:26:03 PM	SiCl4 pre valve closed
10/24/2010	2:26:03 PM	SiCl4 post valve closed
10/24/2010	2:26:03 PM	Bubbler valve closed
10/24/2010	2:26:03 PM	Helium valve opened
10/24/2010	2:26:03 PM	Main Vac valve opened
10/24/2010	2:26:03 PM	Bypass valve opened
10/24/2010	2:26:03 PM	Helium MFC set to  100.000000
10/24/2010	2:26:03 PM	H2 MFC set to  0.000000
10/24/2010	2:26:03 PM	BCl3 MFC set to  0.000000
10/24/2010	2:26:03 PM	PHl3 MFC set to  0.000000
10/24/2010	2:26:03 PM	SiCl4 MFC set to  0.000000
10/24/2010	2:26:03 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	2:26:03 PM	Tube furnace set to 0
10/24/2010	2:27:03 PM	Helium valve closed
10/24/2010	2:27:03 PM	H2 valve closed
10/24/2010	2:27:03 PM	BCl3 valve closed
10/24/2010	2:27:03 PM	PH3 valve closed
10/24/2010	2:27:03 PM	SiCl4 pre valve closed
10/24/2010	2:27:03 PM	SiCl4 post valve closed
10/24/2010	2:27:03 PM	Bubbler valve closed
10/24/2010	2:27:03 PM	Main Vac valve opened
10/24/2010	2:27:03 PM	Bypass valve opened
10/24/2010	2:27:03 PM	Helium MFC set to  0.000000
10/24/2010	2:27:03 PM	H2 MFC set to  0.000000
10/24/2010	2:27:03 PM	BCl3 MFC set to  0.000000
10/24/2010	2:27:03 PM	PHl3 MFC set to  0.000000
10/24/2010	2:27:03 PM	SiCl4 MFC set to  0.000000
10/24/2010	2:27:03 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	2:27:03 PM	Tube furnace set to 0
10/24/2010	2:28:03 PM	H2 valve closed
10/24/2010	2:28:03 PM	BCl3 valve closed
10/24/2010	2:28:03 PM	PH3 valve closed
10/24/2010	2:28:03 PM	SiCl4 pre valve closed
10/24/2010	2:28:03 PM	SiCl4 post valve closed
10/24/2010	2:28:03 PM	Bubbler valve closed
10/24/2010	2:28:03 PM	Helium valve opened
10/24/2010	2:28:03 PM	Main Vac valve opened
10/24/2010	2:28:03 PM	Bypass valve opened
10/24/2010	2:28:03 PM	Helium MFC set to  100.000000
10/24/2010	2:28:03 PM	H2 MFC set to  0.000000
10/24/2010	2:28:03 PM	BCl3 MFC set to  0.000000
10/24/2010	2:28:03 PM	PHl3 MFC set to  0.000000
10/24/2010	2:28:03 PM	SiCl4 MFC set to  0.000000
10/24/2010	2:28:03 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	2:28:04 PM	Tube furnace set to 0
10/24/2010	2:29:04 PM	Helium valve closed
10/24/2010	2:29:04 PM	H2 valve closed
10/24/2010	2:29:04 PM	BCl3 valve closed
10/24/2010	2:29:04 PM	PH3 valve closed
10/24/2010	2:29:04 PM	SiCl4 pre valve closed
10/24/2010	2:29:04 PM	SiCl4 post valve closed
10/24/2010	2:29:04 PM	Bubbler valve closed
10/24/2010	2:29:04 PM	Main Vac valve opened
10/24/2010	2:29:04 PM	Bypass valve opened
10/24/2010	2:29:04 PM	Helium MFC set to  0.000000
10/24/2010	2:29:04 PM	H2 MFC set to  0.000000
10/24/2010	2:29:04 PM	BCl3 MFC set to  0.000000
10/24/2010	2:29:04 PM	PHl3 MFC set to  0.000000
10/24/2010	2:29:04 PM	SiCl4 MFC set to  0.000000
10/24/2010	2:29:04 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	2:29:04 PM	Tube furnace set to 0
10/24/2010	2:30:04 PM	H2 valve closed
10/24/2010	2:30:04 PM	BCl3 valve closed
10/24/2010	2:30:04 PM	PH3 valve closed
10/24/2010	2:30:04 PM	SiCl4 pre valve closed
10/24/2010	2:30:04 PM	SiCl4 post valve closed
10/24/2010	2:30:04 PM	Bubbler valve closed
10/24/2010	2:30:04 PM	Helium valve opened
10/24/2010	2:30:04 PM	Main Vac valve opened
10/24/2010	2:30:04 PM	Bypass valve opened
10/24/2010	2:30:04 PM	Helium MFC set to  100.000000
10/24/2010	2:30:04 PM	H2 MFC set to  0.000000
10/24/2010	2:30:04 PM	BCl3 MFC set to  0.000000
10/24/2010	2:30:04 PM	PHl3 MFC set to  0.000000
10/24/2010	2:30:04 PM	SiCl4 MFC set to  0.000000
10/24/2010	2:30:04 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	2:30:04 PM	Tube furnace set to 0
10/24/2010	2:31:04 PM	Helium valve closed
10/24/2010	2:31:04 PM	H2 valve closed
10/24/2010	2:31:04 PM	BCl3 valve closed
10/24/2010	2:31:04 PM	PH3 valve closed
10/24/2010	2:31:04 PM	SiCl4 pre valve closed
10/24/2010	2:31:04 PM	SiCl4 post valve closed
10/24/2010	2:31:04 PM	Bubbler valve closed
10/24/2010	2:31:04 PM	Main Vac valve opened
10/24/2010	2:31:04 PM	Bypass valve opened
10/24/2010	2:31:04 PM	Helium MFC set to  0.000000
10/24/2010	2:31:04 PM	H2 MFC set to  0.000000
10/24/2010	2:31:04 PM	BCl3 MFC set to  0.000000
10/24/2010	2:31:04 PM	PHl3 MFC set to  0.000000
10/24/2010	2:31:04 PM	SiCl4 MFC set to  0.000000
10/24/2010	2:31:04 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	2:31:04 PM	Tube furnace set to 0
10/24/2010	2:32:04 PM	H2 valve closed
10/24/2010	2:32:04 PM	BCl3 valve closed
10/24/2010	2:32:04 PM	PH3 valve closed
10/24/2010	2:32:04 PM	SiCl4 pre valve closed
10/24/2010	2:32:04 PM	SiCl4 post valve closed
10/24/2010	2:32:04 PM	Bubbler valve closed
10/24/2010	2:32:04 PM	Helium valve opened
10/24/2010	2:32:04 PM	Main Vac valve opened
10/24/2010	2:32:04 PM	Bypass valve opened
10/24/2010	2:32:04 PM	Helium MFC set to  100.000000
10/24/2010	2:32:04 PM	H2 MFC set to  0.000000
10/24/2010	2:32:04 PM	BCl3 MFC set to  0.000000
10/24/2010	2:32:04 PM	PHl3 MFC set to  0.000000
10/24/2010	2:32:04 PM	SiCl4 MFC set to  0.000000
10/24/2010	2:32:04 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	2:32:04 PM	Tube furnace set to 0
10/24/2010	2:33:04 PM	Helium valve closed
10/24/2010	2:33:04 PM	H2 valve closed
10/24/2010	2:33:04 PM	BCl3 valve closed
10/24/2010	2:33:04 PM	PH3 valve closed
10/24/2010	2:33:04 PM	SiCl4 pre valve closed
10/24/2010	2:33:04 PM	SiCl4 post valve closed
10/24/2010	2:33:04 PM	Bubbler valve closed
10/24/2010	2:33:04 PM	Main Vac valve opened
10/24/2010	2:33:04 PM	Bypass valve opened
10/24/2010	2:33:04 PM	Helium MFC set to  0.000000
10/24/2010	2:33:04 PM	H2 MFC set to  0.000000
10/24/2010	2:33:04 PM	BCl3 MFC set to  0.000000
10/24/2010	2:33:04 PM	PHl3 MFC set to  0.000000
10/24/2010	2:33:04 PM	SiCl4 MFC set to  0.000000
10/24/2010	2:33:04 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	2:33:04 PM	Tube furnace set to 0
10/24/2010	2:34:05 PM	H2 valve closed
10/24/2010	2:34:05 PM	BCl3 valve closed
10/24/2010	2:34:05 PM	PH3 valve closed
10/24/2010	2:34:05 PM	SiCl4 pre valve closed
10/24/2010	2:34:05 PM	SiCl4 post valve closed
10/24/2010	2:34:05 PM	Bubbler valve closed
10/24/2010	2:34:05 PM	Helium valve opened
10/24/2010	2:34:05 PM	Main Vac valve opened
10/24/2010	2:34:05 PM	Bypass valve opened
10/24/2010	2:34:05 PM	Helium MFC set to  100.000000
10/24/2010	2:34:05 PM	H2 MFC set to  0.000000
10/24/2010	2:34:05 PM	BCl3 MFC set to  0.000000
10/24/2010	2:34:05 PM	PHl3 MFC set to  0.000000
10/24/2010	2:34:05 PM	SiCl4 MFC set to  0.000000
10/24/2010	2:34:05 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	2:34:05 PM	Tube furnace set to 0
10/24/2010	2:35:05 PM	Helium valve closed
10/24/2010	2:35:05 PM	H2 valve closed
10/24/2010	2:35:05 PM	BCl3 valve closed
10/24/2010	2:35:05 PM	PH3 valve closed
10/24/2010	2:35:05 PM	SiCl4 pre valve closed
10/24/2010	2:35:05 PM	SiCl4 post valve closed
10/24/2010	2:35:05 PM	Bubbler valve closed
10/24/2010	2:35:05 PM	Main Vac valve opened
10/24/2010	2:35:05 PM	Bypass valve opened
10/24/2010	2:35:05 PM	Helium MFC set to  0.000000
10/24/2010	2:35:05 PM	H2 MFC set to  0.000000
10/24/2010	2:35:05 PM	BCl3 MFC set to  0.000000
10/24/2010	2:35:05 PM	PHl3 MFC set to  0.000000
10/24/2010	2:35:05 PM	SiCl4 MFC set to  0.000000
10/24/2010	2:35:05 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	2:35:05 PM	Tube furnace set to 0
10/24/2010	2:36:05 PM	H2 valve closed
10/24/2010	2:36:05 PM	BCl3 valve closed
10/24/2010	2:36:05 PM	PH3 valve closed
10/24/2010	2:36:05 PM	SiCl4 pre valve closed
10/24/2010	2:36:05 PM	SiCl4 post valve closed
10/24/2010	2:36:05 PM	Bubbler valve closed
10/24/2010	2:36:05 PM	Helium valve opened
10/24/2010	2:36:05 PM	Main Vac valve opened
10/24/2010	2:36:05 PM	Bypass valve opened
10/24/2010	2:36:05 PM	Helium MFC set to  100.000000
10/24/2010	2:36:05 PM	H2 MFC set to  0.000000
10/24/2010	2:36:05 PM	BCl3 MFC set to  0.000000
10/24/2010	2:36:05 PM	PHl3 MFC set to  0.000000
10/24/2010	2:36:05 PM	SiCl4 MFC set to  0.000000
10/24/2010	2:36:05 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	2:36:05 PM	Tube furnace set to 0
10/24/2010	2:37:05 PM	Helium valve closed
10/24/2010	2:37:05 PM	H2 valve closed
10/24/2010	2:37:05 PM	BCl3 valve closed
10/24/2010	2:37:05 PM	PH3 valve closed
10/24/2010	2:37:05 PM	SiCl4 pre valve closed
10/24/2010	2:37:05 PM	SiCl4 post valve closed
10/24/2010	2:37:05 PM	Bubbler valve closed
10/24/2010	2:37:05 PM	Main Vac valve opened
10/24/2010	2:37:05 PM	Bypass valve opened
10/24/2010	2:37:05 PM	Helium MFC set to  0.000000
10/24/2010	2:37:05 PM	H2 MFC set to  0.000000
10/24/2010	2:37:05 PM	BCl3 MFC set to  0.000000
10/24/2010	2:37:05 PM	PHl3 MFC set to  0.000000
10/24/2010	2:37:05 PM	SiCl4 MFC set to  0.000000
10/24/2010	2:37:05 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	2:37:05 PM	Tube furnace set to 0
10/24/2010	2:38:05 PM	H2 valve closed
10/24/2010	2:38:05 PM	BCl3 valve closed
10/24/2010	2:38:05 PM	PH3 valve closed
10/24/2010	2:38:05 PM	SiCl4 pre valve closed
10/24/2010	2:38:05 PM	SiCl4 post valve closed
10/24/2010	2:38:05 PM	Bubbler valve closed
10/24/2010	2:38:05 PM	Helium valve opened
10/24/2010	2:38:05 PM	Main Vac valve opened
10/24/2010	2:38:05 PM	Bypass valve opened
10/24/2010	2:38:05 PM	Helium MFC set to  100.000000
10/24/2010	2:38:05 PM	H2 MFC set to  0.000000
10/24/2010	2:38:05 PM	BCl3 MFC set to  0.000000
10/24/2010	2:38:05 PM	PHl3 MFC set to  0.000000
10/24/2010	2:38:05 PM	SiCl4 MFC set to  0.000000
10/24/2010	2:38:05 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	2:38:05 PM	Tube furnace set to 0
10/24/2010	2:39:05 PM	Helium valve closed
10/24/2010	2:39:05 PM	H2 valve closed
10/24/2010	2:39:06 PM	BCl3 valve closed
10/24/2010	2:39:06 PM	PH3 valve closed
10/24/2010	2:39:06 PM	SiCl4 pre valve closed
10/24/2010	2:39:06 PM	SiCl4 post valve closed
10/24/2010	2:39:06 PM	Bubbler valve closed
10/24/2010	2:39:06 PM	Main Vac valve opened
10/24/2010	2:39:06 PM	Bypass valve opened
10/24/2010	2:39:06 PM	Helium MFC set to  0.000000
10/24/2010	2:39:06 PM	H2 MFC set to  0.000000
10/24/2010	2:39:06 PM	BCl3 MFC set to  0.000000
10/24/2010	2:39:06 PM	PHl3 MFC set to  0.000000
10/24/2010	2:39:06 PM	SiCl4 MFC set to  0.000000
10/24/2010	2:39:06 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	2:39:06 PM	Tube furnace set to 0
10/24/2010	2:40:06 PM	H2 valve closed
10/24/2010	2:40:06 PM	BCl3 valve closed
10/24/2010	2:40:06 PM	PH3 valve closed
10/24/2010	2:40:06 PM	SiCl4 pre valve closed
10/24/2010	2:40:06 PM	SiCl4 post valve closed
10/24/2010	2:40:06 PM	Bubbler valve closed
10/24/2010	2:40:06 PM	Helium valve opened
10/24/2010	2:40:06 PM	Main Vac valve opened
10/24/2010	2:40:06 PM	Bypass valve opened
10/24/2010	2:40:06 PM	Helium MFC set to  100.000000
10/24/2010	2:40:06 PM	H2 MFC set to  0.000000
10/24/2010	2:40:06 PM	BCl3 MFC set to  0.000000
10/24/2010	2:40:06 PM	PHl3 MFC set to  0.000000
10/24/2010	2:40:06 PM	SiCl4 MFC set to  0.000000
10/24/2010	2:40:06 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	2:40:06 PM	Tube furnace set to 0
10/24/2010	2:41:06 PM	Helium valve closed
10/24/2010	2:41:06 PM	H2 valve closed
10/24/2010	2:41:06 PM	BCl3 valve closed
10/24/2010	2:41:06 PM	PH3 valve closed
10/24/2010	2:41:06 PM	SiCl4 pre valve closed
10/24/2010	2:41:06 PM	SiCl4 post valve closed
10/24/2010	2:41:06 PM	Bubbler valve closed
10/24/2010	2:41:06 PM	Main Vac valve opened
10/24/2010	2:41:06 PM	Bypass valve opened
10/24/2010	2:41:06 PM	Helium MFC set to  0.000000
10/24/2010	2:41:06 PM	H2 MFC set to  0.000000
10/24/2010	2:41:06 PM	BCl3 MFC set to  0.000000
10/24/2010	2:41:06 PM	PHl3 MFC set to  0.000000
10/24/2010	2:41:06 PM	SiCl4 MFC set to  0.000000
10/24/2010	2:41:06 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	2:41:06 PM	Tube furnace set to 0
10/24/2010	2:42:06 PM	H2 valve closed
10/24/2010	2:42:06 PM	BCl3 valve closed
10/24/2010	2:42:06 PM	PH3 valve closed
10/24/2010	2:42:06 PM	SiCl4 pre valve closed
10/24/2010	2:42:06 PM	SiCl4 post valve closed
10/24/2010	2:42:06 PM	Bubbler valve closed
10/24/2010	2:42:06 PM	Helium valve opened
10/24/2010	2:42:06 PM	Main Vac valve opened
10/24/2010	2:42:06 PM	Bypass valve opened
10/24/2010	2:42:06 PM	Helium MFC set to  100.000000
10/24/2010	2:42:06 PM	H2 MFC set to  0.000000
10/24/2010	2:42:06 PM	BCl3 MFC set to  0.000000
10/24/2010	2:42:06 PM	PHl3 MFC set to  0.000000
10/24/2010	2:42:06 PM	SiCl4 MFC set to  0.000000
10/24/2010	2:42:06 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	2:42:06 PM	Tube furnace set to 0
10/24/2010	2:43:06 PM	Helium valve closed
10/24/2010	2:43:06 PM	H2 valve closed
10/24/2010	2:43:06 PM	BCl3 valve closed
10/24/2010	2:43:06 PM	PH3 valve closed
10/24/2010	2:43:06 PM	SiCl4 pre valve closed
10/24/2010	2:43:06 PM	SiCl4 post valve closed
10/24/2010	2:43:06 PM	Bubbler valve closed
10/24/2010	2:43:06 PM	Main Vac valve opened
10/24/2010	2:43:06 PM	Bypass valve opened
10/24/2010	2:43:06 PM	Helium MFC set to  0.000000
10/24/2010	2:43:06 PM	H2 MFC set to  0.000000
10/24/2010	2:43:06 PM	BCl3 MFC set to  0.000000
10/24/2010	2:43:06 PM	PHl3 MFC set to  0.000000
10/24/2010	2:43:06 PM	SiCl4 MFC set to  0.000000
10/24/2010	2:43:06 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	2:43:06 PM	Tube furnace set to 0
10/24/2010	2:43:07 PM	Run finished at 2:43 PM
10/24/2010	2:43:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/24/2010	2:43:42 PM	Helium MFC set to  100.000000
10/24/2010	2:43:43 PM	Helium valve opened
10/24/2010	2:54:45 PM	Helium valve closed
10/24/2010	2:54:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/24/2010	2:54:47 PM	Recipe started at 2:54 PM
10/24/2010	2:54:47 PM	Helium valve closed
10/24/2010	2:54:47 PM	H2 valve closed
10/24/2010	2:54:47 PM	BCl3 valve closed
10/24/2010	2:54:47 PM	PH3 valve closed
10/24/2010	2:54:47 PM	SiCl4 pre valve closed
10/24/2010	2:54:47 PM	SiCl4 post valve closed
10/24/2010	2:54:47 PM	Main Vac valve closed
10/24/2010	2:54:47 PM	Bubbler valve closed
10/24/2010	2:54:47 PM	Bypass valve opened
10/24/2010	2:54:47 PM	Helium MFC set to  0.000000
10/24/2010	2:54:47 PM	H2 MFC set to  0.000000
10/24/2010	2:54:47 PM	BCl3 MFC set to  0.000000
10/24/2010	2:54:47 PM	PHl3 MFC set to  0.000000
10/24/2010	2:54:47 PM	SiCl4 MFC set to  0.000000
10/24/2010	2:54:47 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	2:54:47 PM	Tube furnace set to 0
10/24/2010	2:54:47 PM	Helium valve closed
10/24/2010	2:54:47 PM	H2 valve closed
10/24/2010	2:54:47 PM	BCl3 valve closed
10/24/2010	2:54:47 PM	PH3 valve closed
10/24/2010	2:54:47 PM	SiCl4 pre valve closed
10/24/2010	2:54:47 PM	SiCl4 post valve closed
10/24/2010	2:54:47 PM	Bubbler valve closed
10/24/2010	2:54:47 PM	Main Vac valve opened
10/24/2010	2:54:47 PM	Bypass valve opened
10/24/2010	2:54:47 PM	Helium MFC set to  0.000000
10/24/2010	2:54:47 PM	H2 MFC set to  0.000000
10/24/2010	2:54:47 PM	BCl3 MFC set to  0.000000
10/24/2010	2:54:47 PM	PHl3 MFC set to  0.000000
10/24/2010	2:54:47 PM	SiCl4 MFC set to  0.000000
10/24/2010	2:54:47 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	2:54:47 PM	Tube furnace set to 0
10/24/2010	2:54:48 PM	Run finished at 2:54 PM
10/24/2010	2:54:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/24/2010	2:55:37 PM	Helium MFC set to  100.000000
10/24/2010	2:55:39 PM	Helium valve opened
10/24/2010	3:10:48 PM	Helium valve closed
10/24/2010	3:10:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/24/2010	3:10:50 PM	Recipe started at 3:10 PM
10/24/2010	3:10:50 PM	Helium valve closed
10/24/2010	3:10:50 PM	H2 valve closed
10/24/2010	3:10:50 PM	BCl3 valve closed
10/24/2010	3:10:50 PM	PH3 valve closed
10/24/2010	3:10:50 PM	SiCl4 pre valve closed
10/24/2010	3:10:50 PM	SiCl4 post valve closed
10/24/2010	3:10:50 PM	Main Vac valve closed
10/24/2010	3:10:50 PM	Bubbler valve closed
10/24/2010	3:10:50 PM	Bypass valve opened
10/24/2010	3:10:50 PM	Helium MFC set to  0.000000
10/24/2010	3:10:50 PM	H2 MFC set to  0.000000
10/24/2010	3:10:50 PM	BCl3 MFC set to  0.000000
10/24/2010	3:10:50 PM	PHl3 MFC set to  0.000000
10/24/2010	3:10:50 PM	SiCl4 MFC set to  0.000000
10/24/2010	3:10:50 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	3:10:50 PM	Tube furnace set to 0
10/24/2010	3:10:50 PM	Helium valve closed
10/24/2010	3:10:50 PM	H2 valve closed
10/24/2010	3:10:50 PM	BCl3 valve closed
10/24/2010	3:10:50 PM	PH3 valve closed
10/24/2010	3:10:50 PM	SiCl4 pre valve closed
10/24/2010	3:10:50 PM	SiCl4 post valve closed
10/24/2010	3:10:50 PM	Bubbler valve closed
10/24/2010	3:10:50 PM	Main Vac valve opened
10/24/2010	3:10:50 PM	Bypass valve opened
10/24/2010	3:10:50 PM	Helium MFC set to  0.000000
10/24/2010	3:10:50 PM	H2 MFC set to  0.000000
10/24/2010	3:10:50 PM	BCl3 MFC set to  0.000000
10/24/2010	3:10:50 PM	PHl3 MFC set to  0.000000
10/24/2010	3:10:50 PM	SiCl4 MFC set to  0.000000
10/24/2010	3:10:50 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	3:10:51 PM	Tube furnace set to 0
10/24/2010	3:10:51 PM	Run finished at 3:10 PM
10/24/2010	3:10:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/24/2010	3:11:36 PM	Recipe started at 3:11 PM
10/24/2010	3:11:36 PM	Helium valve closed
10/24/2010	3:11:36 PM	BCl3 valve closed
10/24/2010	3:11:36 PM	PH3 valve closed
10/24/2010	3:11:36 PM	SiCl4 pre valve closed
10/24/2010	3:11:36 PM	SiCl4 post valve closed
10/24/2010	3:11:36 PM	Main Vac valve closed
10/24/2010	3:11:36 PM	Bypass valve closed
10/24/2010	3:11:36 PM	Bubbler valve closed
10/24/2010	3:11:36 PM	H2 valve opened
10/24/2010	3:11:36 PM	Helium MFC set to  0.000000
10/24/2010	3:11:36 PM	H2 MFC set to  500.000000
10/24/2010	3:11:36 PM	BCl3 MFC set to  0.000000
10/24/2010	3:11:36 PM	PHl3 MFC set to  0.000000
10/24/2010	3:11:36 PM	SiCl4 MFC set to  0.000000
10/24/2010	3:11:36 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	3:11:36 PM	Tube furnace set to 1000
10/24/2010	3:12:55 PM	Helium valve closed
10/24/2010	3:12:55 PM	BCl3 valve closed
10/24/2010	3:12:55 PM	PH3 valve closed
10/24/2010	3:12:55 PM	SiCl4 pre valve closed
10/24/2010	3:12:55 PM	SiCl4 post valve closed
10/24/2010	3:12:55 PM	Main Vac valve closed
10/24/2010	3:12:55 PM	Bypass valve closed
10/24/2010	3:12:55 PM	H2 valve opened
10/24/2010	3:12:55 PM	Bubbler valve opened
10/24/2010	3:12:55 PM	Helium MFC set to  0.000000
10/24/2010	3:12:55 PM	H2 MFC set to  500.000000
10/24/2010	3:12:55 PM	BCl3 MFC set to  0.000000
10/24/2010	3:12:55 PM	PHl3 MFC set to  0.000000
10/24/2010	3:12:55 PM	SiCl4 MFC set to  0.000000
10/24/2010	3:12:55 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	3:12:56 PM	Tube furnace set to 1000
10/24/2010	3:32:56 PM	Helium valve closed
10/24/2010	3:32:56 PM	PH3 valve closed
10/24/2010	3:32:56 PM	Main Vac valve closed
10/24/2010	3:32:56 PM	Bypass valve closed
10/24/2010	3:32:56 PM	H2 valve opened
10/24/2010	3:32:56 PM	BCl3 valve opened
10/24/2010	3:32:56 PM	SiCl4 pre valve opened
10/24/2010	3:32:56 PM	SiCl4 post valve opened
10/24/2010	3:32:56 PM	Bubbler valve opened
10/24/2010	3:32:56 PM	Helium MFC set to  0.000000
10/24/2010	3:32:56 PM	H2 MFC set to  500.000000
10/24/2010	3:32:56 PM	BCl3 MFC set to  12.000000
10/24/2010	3:32:56 PM	PHl3 MFC set to  0.000000
10/24/2010	3:32:56 PM	SiCl4 MFC set to  50.000000
10/24/2010	3:32:56 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	3:32:56 PM	Tube furnace set to 1000
10/24/2010	3:46:16 PM	Helium valve closed
10/24/2010	3:46:16 PM	BCl3 valve closed
10/24/2010	3:46:16 PM	PH3 valve closed
10/24/2010	3:46:16 PM	SiCl4 pre valve closed
10/24/2010	3:46:16 PM	SiCl4 post valve closed
10/24/2010	3:46:16 PM	Main Vac valve closed
10/24/2010	3:46:16 PM	Bypass valve closed
10/24/2010	3:46:16 PM	H2 valve opened
10/24/2010	3:46:16 PM	Bubbler valve opened
10/24/2010	3:46:16 PM	Helium MFC set to  0.000000
10/24/2010	3:46:16 PM	H2 MFC set to  500.000000
10/24/2010	3:46:16 PM	BCl3 MFC set to  0.000000
10/24/2010	3:46:16 PM	PHl3 MFC set to  0.000000
10/24/2010	3:46:16 PM	SiCl4 MFC set to  0.000000
10/24/2010	3:46:16 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	3:46:16 PM	Tube furnace set to 750
10/24/2010	4:06:16 PM	H2 valve closed
10/24/2010	4:06:16 PM	BCl3 valve closed
10/24/2010	4:06:16 PM	PH3 valve closed
10/24/2010	4:06:16 PM	SiCl4 pre valve closed
10/24/2010	4:06:16 PM	SiCl4 post valve closed
10/24/2010	4:06:16 PM	Main Vac valve closed
10/24/2010	4:06:16 PM	Bypass valve closed
10/24/2010	4:06:16 PM	Helium valve opened
10/24/2010	4:06:16 PM	Bubbler valve opened
10/24/2010	4:06:16 PM	Helium MFC set to  500.000000
10/24/2010	4:06:16 PM	H2 MFC set to  0.000000
10/24/2010	4:06:16 PM	BCl3 MFC set to  0.000000
10/24/2010	4:06:16 PM	PHl3 MFC set to  0.000000
10/24/2010	4:06:16 PM	SiCl4 MFC set to  0.000000
10/24/2010	4:06:16 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	4:06:16 PM	Tube furnace set to 0
10/24/2010	4:11:35 PM	Run aborted at 4:11 PM
10/24/2010	4:11:35 PM	Helium valve closed
10/24/2010	4:11:35 PM	H2 valve closed
10/24/2010	4:11:35 PM	BCl3 valve closed
10/24/2010	4:11:35 PM	PH3 valve closed
10/24/2010	4:11:35 PM	SiCl4 pre valve closed
10/24/2010	4:11:35 PM	SiCl4 post valve closed
10/24/2010	4:11:35 PM	Bypass valve closed
10/24/2010	4:11:35 PM	Main Vac valve closed
10/24/2010	4:11:35 PM	Bubbler valve closed
10/24/2010	4:11:35 PM	Helium MFC set to  0.000000
10/24/2010	4:11:35 PM	H2 MFC set to  0.000000
10/24/2010	4:11:35 PM	BCl3 MFC set to  0.000000
10/24/2010	4:11:35 PM	PHl3 MFC set to  0.000000
10/24/2010	4:11:35 PM	SiCl4 MFC set to  0.000000
10/24/2010	4:11:35 PM	Tube furnace set to 0
10/24/2010	4:11:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/24/2010	4:11:37 PM	Recipe started at 4:11 PM
10/24/2010	4:11:37 PM	H2 valve closed
10/24/2010	4:11:37 PM	BCl3 valve closed
10/24/2010	4:11:37 PM	PH3 valve closed
10/24/2010	4:11:37 PM	SiCl4 pre valve closed
10/24/2010	4:11:37 PM	SiCl4 post valve closed
10/24/2010	4:11:37 PM	Main Vac valve closed
10/24/2010	4:11:37 PM	Bypass valve closed
10/24/2010	4:11:37 PM	Bubbler valve closed
10/24/2010	4:11:37 PM	Helium valve opened
10/24/2010	4:11:37 PM	Helium MFC set to  500.000000
10/24/2010	4:11:37 PM	H2 MFC set to  0.000000
10/24/2010	4:11:37 PM	BCl3 MFC set to  0.000000
10/24/2010	4:11:37 PM	PHl3 MFC set to  0.000000
10/24/2010	4:11:37 PM	SiCl4 MFC set to  0.000000
10/24/2010	4:11:37 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	4:11:37 PM	Tube furnace set to 0
10/24/2010	4:11:38 PM	Helium valve closed
10/24/2010	4:11:38 PM	H2 valve closed
10/24/2010	4:11:38 PM	BCl3 valve closed
10/24/2010	4:11:38 PM	PH3 valve closed
10/24/2010	4:11:38 PM	SiCl4 pre valve closed
10/24/2010	4:11:38 PM	SiCl4 post valve closed
10/24/2010	4:11:38 PM	Main Vac valve closed
10/24/2010	4:11:38 PM	Bypass valve closed
10/24/2010	4:11:38 PM	Bubbler valve closed
10/24/2010	4:11:38 PM	Helium MFC set to  0.000000
10/24/2010	4:11:38 PM	H2 MFC set to  0.000000
10/24/2010	4:11:38 PM	BCl3 MFC set to  0.000000
10/24/2010	4:11:38 PM	PHl3 MFC set to  0.000000
10/24/2010	4:11:38 PM	SiCl4 MFC set to  0.000000
10/24/2010	4:11:38 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	4:11:38 PM	Tube furnace set to 0
10/24/2010	4:11:38 PM	Run finished at 4:11 PM
10/24/2010	4:11:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/24/2010	4:17:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/24/2010	4:17:25 PM	Recipe started at 4:17 PM
10/24/2010	4:17:25 PM	Helium valve closed
10/24/2010	4:17:25 PM	H2 valve closed
10/24/2010	4:17:25 PM	BCl3 valve closed
10/24/2010	4:17:25 PM	PH3 valve closed
10/24/2010	4:17:25 PM	SiCl4 pre valve closed
10/24/2010	4:17:25 PM	SiCl4 post valve closed
10/24/2010	4:17:25 PM	Main Vac valve closed
10/24/2010	4:17:25 PM	Bubbler valve closed
10/24/2010	4:17:25 PM	Bypass valve opened
10/24/2010	4:17:25 PM	Helium MFC set to  0.000000
10/24/2010	4:17:25 PM	H2 MFC set to  0.000000
10/24/2010	4:17:25 PM	BCl3 MFC set to  0.000000
10/24/2010	4:17:25 PM	PHl3 MFC set to  0.000000
10/24/2010	4:17:25 PM	SiCl4 MFC set to  0.000000
10/24/2010	4:17:25 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	4:17:26 PM	Tube furnace set to 0
10/24/2010	4:18:15 PM	Helium valve closed
10/24/2010	4:18:15 PM	H2 valve closed
10/24/2010	4:18:15 PM	BCl3 valve closed
10/24/2010	4:18:15 PM	PH3 valve closed
10/24/2010	4:18:15 PM	SiCl4 pre valve closed
10/24/2010	4:18:15 PM	SiCl4 post valve closed
10/24/2010	4:18:15 PM	Bubbler valve closed
10/24/2010	4:18:15 PM	Main Vac valve opened
10/24/2010	4:18:15 PM	Bypass valve opened
10/24/2010	4:18:15 PM	Helium MFC set to  0.000000
10/24/2010	4:18:15 PM	H2 MFC set to  0.000000
10/24/2010	4:18:15 PM	BCl3 MFC set to  0.000000
10/24/2010	4:18:15 PM	PHl3 MFC set to  0.000000
10/24/2010	4:18:15 PM	SiCl4 MFC set to  0.000000
10/24/2010	4:18:15 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	4:18:15 PM	Tube furnace set to 0
10/24/2010	4:18:16 PM	Run finished at 4:18 PM
10/24/2010	4:18:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/24/2010	4:21:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/24/2010	4:21:23 PM	Recipe started at 4:21 PM
10/24/2010	4:21:23 PM	Helium valve closed
10/24/2010	4:21:23 PM	H2 valve closed
10/24/2010	4:21:23 PM	BCl3 valve closed
10/24/2010	4:21:23 PM	PH3 valve closed
10/24/2010	4:21:23 PM	SiCl4 pre valve closed
10/24/2010	4:21:23 PM	SiCl4 post valve closed
10/24/2010	4:21:23 PM	Main Vac valve closed
10/24/2010	4:21:23 PM	Bubbler valve closed
10/24/2010	4:21:23 PM	Bypass valve opened
10/24/2010	4:21:23 PM	Helium MFC set to  0.000000
10/24/2010	4:21:23 PM	H2 MFC set to  0.000000
10/24/2010	4:21:23 PM	BCl3 MFC set to  0.000000
10/24/2010	4:21:23 PM	PHl3 MFC set to  0.000000
10/24/2010	4:21:23 PM	SiCl4 MFC set to  0.000000
10/24/2010	4:21:23 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	4:21:24 PM	Tube furnace set to 0
10/24/2010	4:21:24 PM	Helium valve closed
10/24/2010	4:21:24 PM	H2 valve closed
10/24/2010	4:21:24 PM	BCl3 valve closed
10/24/2010	4:21:24 PM	PH3 valve closed
10/24/2010	4:21:24 PM	SiCl4 pre valve closed
10/24/2010	4:21:24 PM	SiCl4 post valve closed
10/24/2010	4:21:24 PM	Bubbler valve closed
10/24/2010	4:21:24 PM	Main Vac valve opened
10/24/2010	4:21:24 PM	Bypass valve opened
10/24/2010	4:21:24 PM	Helium MFC set to  0.000000
10/24/2010	4:21:24 PM	H2 MFC set to  0.000000
10/24/2010	4:21:24 PM	BCl3 MFC set to  0.000000
10/24/2010	4:21:24 PM	PHl3 MFC set to  0.000000
10/24/2010	4:21:24 PM	SiCl4 MFC set to  0.000000
10/24/2010	4:21:24 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	4:21:24 PM	Tube furnace set to 0
10/24/2010	4:22:24 PM	H2 valve closed
10/24/2010	4:22:24 PM	BCl3 valve closed
10/24/2010	4:22:24 PM	PH3 valve closed
10/24/2010	4:22:24 PM	SiCl4 pre valve closed
10/24/2010	4:22:24 PM	SiCl4 post valve closed
10/24/2010	4:22:24 PM	Bubbler valve closed
10/24/2010	4:22:24 PM	Helium valve opened
10/24/2010	4:22:24 PM	Main Vac valve opened
10/24/2010	4:22:24 PM	Bypass valve opened
10/24/2010	4:22:24 PM	Helium MFC set to  100.000000
10/24/2010	4:22:24 PM	H2 MFC set to  0.000000
10/24/2010	4:22:24 PM	BCl3 MFC set to  0.000000
10/24/2010	4:22:24 PM	PHl3 MFC set to  0.000000
10/24/2010	4:22:24 PM	SiCl4 MFC set to  0.000000
10/24/2010	4:22:24 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	4:22:24 PM	Tube furnace set to 0
10/24/2010	4:23:24 PM	Helium valve closed
10/24/2010	4:23:24 PM	H2 valve closed
10/24/2010	4:23:24 PM	BCl3 valve closed
10/24/2010	4:23:24 PM	PH3 valve closed
10/24/2010	4:23:24 PM	SiCl4 pre valve closed
10/24/2010	4:23:24 PM	SiCl4 post valve closed
10/24/2010	4:23:24 PM	Bubbler valve closed
10/24/2010	4:23:24 PM	Main Vac valve opened
10/24/2010	4:23:24 PM	Bypass valve opened
10/24/2010	4:23:24 PM	Helium MFC set to  0.000000
10/24/2010	4:23:24 PM	H2 MFC set to  0.000000
10/24/2010	4:23:24 PM	BCl3 MFC set to  0.000000
10/24/2010	4:23:24 PM	PHl3 MFC set to  0.000000
10/24/2010	4:23:24 PM	SiCl4 MFC set to  0.000000
10/24/2010	4:23:24 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	4:23:24 PM	Tube furnace set to 0
10/24/2010	4:24:24 PM	H2 valve closed
10/24/2010	4:24:24 PM	BCl3 valve closed
10/24/2010	4:24:24 PM	PH3 valve closed
10/24/2010	4:24:24 PM	SiCl4 pre valve closed
10/24/2010	4:24:24 PM	SiCl4 post valve closed
10/24/2010	4:24:24 PM	Bubbler valve closed
10/24/2010	4:24:24 PM	Helium valve opened
10/24/2010	4:24:24 PM	Main Vac valve opened
10/24/2010	4:24:24 PM	Bypass valve opened
10/24/2010	4:24:24 PM	Helium MFC set to  100.000000
10/24/2010	4:24:25 PM	H2 MFC set to  0.000000
10/24/2010	4:24:25 PM	BCl3 MFC set to  0.000000
10/24/2010	4:24:25 PM	PHl3 MFC set to  0.000000
10/24/2010	4:24:25 PM	SiCl4 MFC set to  0.000000
10/24/2010	4:24:25 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	4:24:25 PM	Tube furnace set to 0
10/24/2010	4:25:25 PM	Helium valve closed
10/24/2010	4:25:25 PM	H2 valve closed
10/24/2010	4:25:25 PM	BCl3 valve closed
10/24/2010	4:25:25 PM	PH3 valve closed
10/24/2010	4:25:25 PM	SiCl4 pre valve closed
10/24/2010	4:25:25 PM	SiCl4 post valve closed
10/24/2010	4:25:25 PM	Bubbler valve closed
10/24/2010	4:25:25 PM	Main Vac valve opened
10/24/2010	4:25:25 PM	Bypass valve opened
10/24/2010	4:25:25 PM	Helium MFC set to  0.000000
10/24/2010	4:25:25 PM	H2 MFC set to  0.000000
10/24/2010	4:25:25 PM	BCl3 MFC set to  0.000000
10/24/2010	4:25:25 PM	PHl3 MFC set to  0.000000
10/24/2010	4:25:25 PM	SiCl4 MFC set to  0.000000
10/24/2010	4:25:25 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	4:25:25 PM	Tube furnace set to 0
10/24/2010	4:26:25 PM	H2 valve closed
10/24/2010	4:26:25 PM	BCl3 valve closed
10/24/2010	4:26:25 PM	PH3 valve closed
10/24/2010	4:26:25 PM	SiCl4 pre valve closed
10/24/2010	4:26:25 PM	SiCl4 post valve closed
10/24/2010	4:26:25 PM	Bubbler valve closed
10/24/2010	4:26:25 PM	Helium valve opened
10/24/2010	4:26:25 PM	Main Vac valve opened
10/24/2010	4:26:25 PM	Bypass valve opened
10/24/2010	4:26:25 PM	Helium MFC set to  100.000000
10/24/2010	4:26:25 PM	H2 MFC set to  0.000000
10/24/2010	4:26:25 PM	BCl3 MFC set to  0.000000
10/24/2010	4:26:25 PM	PHl3 MFC set to  0.000000
10/24/2010	4:26:25 PM	SiCl4 MFC set to  0.000000
10/24/2010	4:26:25 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	4:26:25 PM	Tube furnace set to 0
10/24/2010	4:27:25 PM	Helium valve closed
10/24/2010	4:27:25 PM	H2 valve closed
10/24/2010	4:27:25 PM	BCl3 valve closed
10/24/2010	4:27:25 PM	PH3 valve closed
10/24/2010	4:27:25 PM	SiCl4 pre valve closed
10/24/2010	4:27:25 PM	SiCl4 post valve closed
10/24/2010	4:27:25 PM	Bubbler valve closed
10/24/2010	4:27:25 PM	Main Vac valve opened
10/24/2010	4:27:25 PM	Bypass valve opened
10/24/2010	4:27:25 PM	Helium MFC set to  0.000000
10/24/2010	4:27:25 PM	H2 MFC set to  0.000000
10/24/2010	4:27:25 PM	BCl3 MFC set to  0.000000
10/24/2010	4:27:25 PM	PHl3 MFC set to  0.000000
10/24/2010	4:27:25 PM	SiCl4 MFC set to  0.000000
10/24/2010	4:27:25 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	4:27:25 PM	Tube furnace set to 0
10/24/2010	4:28:25 PM	H2 valve closed
10/24/2010	4:28:25 PM	BCl3 valve closed
10/24/2010	4:28:25 PM	PH3 valve closed
10/24/2010	4:28:25 PM	SiCl4 pre valve closed
10/24/2010	4:28:25 PM	SiCl4 post valve closed
10/24/2010	4:28:25 PM	Bubbler valve closed
10/24/2010	4:28:25 PM	Helium valve opened
10/24/2010	4:28:25 PM	Main Vac valve opened
10/24/2010	4:28:25 PM	Bypass valve opened
10/24/2010	4:28:25 PM	Helium MFC set to  100.000000
10/24/2010	4:28:25 PM	H2 MFC set to  0.000000
10/24/2010	4:28:25 PM	BCl3 MFC set to  0.000000
10/24/2010	4:28:25 PM	PHl3 MFC set to  0.000000
10/24/2010	4:28:25 PM	SiCl4 MFC set to  0.000000
10/24/2010	4:28:25 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	4:28:25 PM	Tube furnace set to 0
10/24/2010	4:29:25 PM	Helium valve closed
10/24/2010	4:29:25 PM	H2 valve closed
10/24/2010	4:29:25 PM	BCl3 valve closed
10/24/2010	4:29:25 PM	PH3 valve closed
10/24/2010	4:29:25 PM	SiCl4 pre valve closed
10/24/2010	4:29:25 PM	SiCl4 post valve closed
10/24/2010	4:29:25 PM	Bubbler valve closed
10/24/2010	4:29:25 PM	Main Vac valve opened
10/24/2010	4:29:25 PM	Bypass valve opened
10/24/2010	4:29:25 PM	Helium MFC set to  0.000000
10/24/2010	4:29:25 PM	H2 MFC set to  0.000000
10/24/2010	4:29:25 PM	BCl3 MFC set to  0.000000
10/24/2010	4:29:25 PM	PHl3 MFC set to  0.000000
10/24/2010	4:29:25 PM	SiCl4 MFC set to  0.000000
10/24/2010	4:29:25 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	4:29:26 PM	Tube furnace set to 0
10/24/2010	4:30:26 PM	H2 valve closed
10/24/2010	4:30:26 PM	BCl3 valve closed
10/24/2010	4:30:26 PM	PH3 valve closed
10/24/2010	4:30:26 PM	SiCl4 pre valve closed
10/24/2010	4:30:26 PM	SiCl4 post valve closed
10/24/2010	4:30:26 PM	Bubbler valve closed
10/24/2010	4:30:26 PM	Helium valve opened
10/24/2010	4:30:26 PM	Main Vac valve opened
10/24/2010	4:30:26 PM	Bypass valve opened
10/24/2010	4:30:26 PM	Helium MFC set to  100.000000
10/24/2010	4:30:26 PM	H2 MFC set to  0.000000
10/24/2010	4:30:26 PM	BCl3 MFC set to  0.000000
10/24/2010	4:30:26 PM	PHl3 MFC set to  0.000000
10/24/2010	4:30:26 PM	SiCl4 MFC set to  0.000000
10/24/2010	4:30:26 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	4:30:26 PM	Tube furnace set to 0
10/24/2010	4:31:26 PM	Helium valve closed
10/24/2010	4:31:26 PM	H2 valve closed
10/24/2010	4:31:26 PM	BCl3 valve closed
10/24/2010	4:31:26 PM	PH3 valve closed
10/24/2010	4:31:26 PM	SiCl4 pre valve closed
10/24/2010	4:31:26 PM	SiCl4 post valve closed
10/24/2010	4:31:26 PM	Bubbler valve closed
10/24/2010	4:31:26 PM	Main Vac valve opened
10/24/2010	4:31:26 PM	Bypass valve opened
10/24/2010	4:31:26 PM	Helium MFC set to  0.000000
10/24/2010	4:31:26 PM	H2 MFC set to  0.000000
10/24/2010	4:31:26 PM	BCl3 MFC set to  0.000000
10/24/2010	4:31:26 PM	PHl3 MFC set to  0.000000
10/24/2010	4:31:26 PM	SiCl4 MFC set to  0.000000
10/24/2010	4:31:26 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	4:31:26 PM	Tube furnace set to 0
10/24/2010	4:32:26 PM	H2 valve closed
10/24/2010	4:32:26 PM	BCl3 valve closed
10/24/2010	4:32:26 PM	PH3 valve closed
10/24/2010	4:32:26 PM	SiCl4 pre valve closed
10/24/2010	4:32:26 PM	SiCl4 post valve closed
10/24/2010	4:32:26 PM	Bubbler valve closed
10/24/2010	4:32:26 PM	Helium valve opened
10/24/2010	4:32:26 PM	Main Vac valve opened
10/24/2010	4:32:26 PM	Bypass valve opened
10/24/2010	4:32:26 PM	Helium MFC set to  100.000000
10/24/2010	4:32:26 PM	H2 MFC set to  0.000000
10/24/2010	4:32:26 PM	BCl3 MFC set to  0.000000
10/24/2010	4:32:26 PM	PHl3 MFC set to  0.000000
10/24/2010	4:32:26 PM	SiCl4 MFC set to  0.000000
10/24/2010	4:32:26 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	4:32:26 PM	Tube furnace set to 0
10/24/2010	4:33:26 PM	Helium valve closed
10/24/2010	4:33:26 PM	H2 valve closed
10/24/2010	4:33:26 PM	BCl3 valve closed
10/24/2010	4:33:26 PM	PH3 valve closed
10/24/2010	4:33:26 PM	SiCl4 pre valve closed
10/24/2010	4:33:26 PM	SiCl4 post valve closed
10/24/2010	4:33:26 PM	Bubbler valve closed
10/24/2010	4:33:26 PM	Main Vac valve opened
10/24/2010	4:33:26 PM	Bypass valve opened
10/24/2010	4:33:26 PM	Helium MFC set to  0.000000
10/24/2010	4:33:26 PM	H2 MFC set to  0.000000
10/24/2010	4:33:26 PM	BCl3 MFC set to  0.000000
10/24/2010	4:33:26 PM	PHl3 MFC set to  0.000000
10/24/2010	4:33:26 PM	SiCl4 MFC set to  0.000000
10/24/2010	4:33:26 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	4:33:26 PM	Tube furnace set to 0
10/24/2010	4:34:26 PM	H2 valve closed
10/24/2010	4:34:26 PM	BCl3 valve closed
10/24/2010	4:34:26 PM	PH3 valve closed
10/24/2010	4:34:26 PM	SiCl4 pre valve closed
10/24/2010	4:34:26 PM	SiCl4 post valve closed
10/24/2010	4:34:26 PM	Bubbler valve closed
10/24/2010	4:34:26 PM	Helium valve opened
10/24/2010	4:34:26 PM	Main Vac valve opened
10/24/2010	4:34:26 PM	Bypass valve opened
10/24/2010	4:34:26 PM	Helium MFC set to  100.000000
10/24/2010	4:34:26 PM	H2 MFC set to  0.000000
10/24/2010	4:34:26 PM	BCl3 MFC set to  0.000000
10/24/2010	4:34:26 PM	PHl3 MFC set to  0.000000
10/24/2010	4:34:26 PM	SiCl4 MFC set to  0.000000
10/24/2010	4:34:26 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	4:34:27 PM	Tube furnace set to 0
10/24/2010	4:35:27 PM	Helium valve closed
10/24/2010	4:35:27 PM	H2 valve closed
10/24/2010	4:35:27 PM	BCl3 valve closed
10/24/2010	4:35:27 PM	PH3 valve closed
10/24/2010	4:35:27 PM	SiCl4 pre valve closed
10/24/2010	4:35:27 PM	SiCl4 post valve closed
10/24/2010	4:35:27 PM	Bubbler valve closed
10/24/2010	4:35:27 PM	Main Vac valve opened
10/24/2010	4:35:27 PM	Bypass valve opened
10/24/2010	4:35:27 PM	Helium MFC set to  0.000000
10/24/2010	4:35:27 PM	H2 MFC set to  0.000000
10/24/2010	4:35:27 PM	BCl3 MFC set to  0.000000
10/24/2010	4:35:27 PM	PHl3 MFC set to  0.000000
10/24/2010	4:35:27 PM	SiCl4 MFC set to  0.000000
10/24/2010	4:35:27 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	4:35:27 PM	Tube furnace set to 0
10/24/2010	4:36:27 PM	H2 valve closed
10/24/2010	4:36:27 PM	BCl3 valve closed
10/24/2010	4:36:27 PM	PH3 valve closed
10/24/2010	4:36:27 PM	SiCl4 pre valve closed
10/24/2010	4:36:27 PM	SiCl4 post valve closed
10/24/2010	4:36:27 PM	Bubbler valve closed
10/24/2010	4:36:27 PM	Helium valve opened
10/24/2010	4:36:27 PM	Main Vac valve opened
10/24/2010	4:36:27 PM	Bypass valve opened
10/24/2010	4:36:27 PM	Helium MFC set to  100.000000
10/24/2010	4:36:27 PM	H2 MFC set to  0.000000
10/24/2010	4:36:27 PM	BCl3 MFC set to  0.000000
10/24/2010	4:36:27 PM	PHl3 MFC set to  0.000000
10/24/2010	4:36:27 PM	SiCl4 MFC set to  0.000000
10/24/2010	4:36:27 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	4:36:27 PM	Tube furnace set to 0
10/24/2010	4:37:27 PM	Helium valve closed
10/24/2010	4:37:27 PM	H2 valve closed
10/24/2010	4:37:27 PM	BCl3 valve closed
10/24/2010	4:37:27 PM	PH3 valve closed
10/24/2010	4:37:27 PM	SiCl4 pre valve closed
10/24/2010	4:37:27 PM	SiCl4 post valve closed
10/24/2010	4:37:27 PM	Bubbler valve closed
10/24/2010	4:37:27 PM	Main Vac valve opened
10/24/2010	4:37:27 PM	Bypass valve opened
10/24/2010	4:37:27 PM	Helium MFC set to  0.000000
10/24/2010	4:37:27 PM	H2 MFC set to  0.000000
10/24/2010	4:37:27 PM	BCl3 MFC set to  0.000000
10/24/2010	4:37:27 PM	PHl3 MFC set to  0.000000
10/24/2010	4:37:27 PM	SiCl4 MFC set to  0.000000
10/24/2010	4:37:27 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	4:37:27 PM	Tube furnace set to 0
10/24/2010	4:38:27 PM	H2 valve closed
10/24/2010	4:38:27 PM	BCl3 valve closed
10/24/2010	4:38:27 PM	PH3 valve closed
10/24/2010	4:38:27 PM	SiCl4 pre valve closed
10/24/2010	4:38:27 PM	SiCl4 post valve closed
10/24/2010	4:38:27 PM	Bubbler valve closed
10/24/2010	4:38:27 PM	Helium valve opened
10/24/2010	4:38:27 PM	Main Vac valve opened
10/24/2010	4:38:27 PM	Bypass valve opened
10/24/2010	4:38:27 PM	Helium MFC set to  100.000000
10/24/2010	4:38:27 PM	H2 MFC set to  0.000000
10/24/2010	4:38:27 PM	BCl3 MFC set to  0.000000
10/24/2010	4:38:27 PM	PHl3 MFC set to  0.000000
10/24/2010	4:38:27 PM	SiCl4 MFC set to  0.000000
10/24/2010	4:38:27 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	4:38:27 PM	Tube furnace set to 0
10/24/2010	4:39:27 PM	Helium valve closed
10/24/2010	4:39:27 PM	H2 valve closed
10/24/2010	4:39:27 PM	BCl3 valve closed
10/24/2010	4:39:27 PM	PH3 valve closed
10/24/2010	4:39:27 PM	SiCl4 pre valve closed
10/24/2010	4:39:27 PM	SiCl4 post valve closed
10/24/2010	4:39:27 PM	Bubbler valve closed
10/24/2010	4:39:27 PM	Main Vac valve opened
10/24/2010	4:39:27 PM	Bypass valve opened
10/24/2010	4:39:27 PM	Helium MFC set to  0.000000
10/24/2010	4:39:27 PM	H2 MFC set to  0.000000
10/24/2010	4:39:27 PM	BCl3 MFC set to  0.000000
10/24/2010	4:39:27 PM	PHl3 MFC set to  0.000000
10/24/2010	4:39:27 PM	SiCl4 MFC set to  0.000000
10/24/2010	4:39:27 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	4:39:28 PM	Tube furnace set to 0
10/24/2010	4:40:28 PM	H2 valve closed
10/24/2010	4:40:28 PM	BCl3 valve closed
10/24/2010	4:40:28 PM	PH3 valve closed
10/24/2010	4:40:28 PM	SiCl4 pre valve closed
10/24/2010	4:40:28 PM	SiCl4 post valve closed
10/24/2010	4:40:28 PM	Bubbler valve closed
10/24/2010	4:40:28 PM	Helium valve opened
10/24/2010	4:40:28 PM	Main Vac valve opened
10/24/2010	4:40:28 PM	Bypass valve opened
10/24/2010	4:40:28 PM	Helium MFC set to  100.000000
10/24/2010	4:40:28 PM	H2 MFC set to  0.000000
10/24/2010	4:40:28 PM	BCl3 MFC set to  0.000000
10/24/2010	4:40:28 PM	PHl3 MFC set to  0.000000
10/24/2010	4:40:28 PM	SiCl4 MFC set to  0.000000
10/24/2010	4:40:28 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	4:40:28 PM	Tube furnace set to 0
10/24/2010	4:41:28 PM	Helium valve closed
10/24/2010	4:41:28 PM	H2 valve closed
10/24/2010	4:41:28 PM	BCl3 valve closed
10/24/2010	4:41:28 PM	PH3 valve closed
10/24/2010	4:41:28 PM	SiCl4 pre valve closed
10/24/2010	4:41:28 PM	SiCl4 post valve closed
10/24/2010	4:41:28 PM	Bubbler valve closed
10/24/2010	4:41:28 PM	Main Vac valve opened
10/24/2010	4:41:28 PM	Bypass valve opened
10/24/2010	4:41:28 PM	Helium MFC set to  0.000000
10/24/2010	4:41:28 PM	H2 MFC set to  0.000000
10/24/2010	4:41:28 PM	BCl3 MFC set to  0.000000
10/24/2010	4:41:28 PM	PHl3 MFC set to  0.000000
10/24/2010	4:41:28 PM	SiCl4 MFC set to  0.000000
10/24/2010	4:41:28 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	4:41:28 PM	Tube furnace set to 0
10/24/2010	4:41:29 PM	Run finished at 4:41 PM
10/24/2010	4:41:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/24/2010	4:44:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/24/2010	4:44:54 PM	Recipe started at 4:44 PM
10/24/2010	4:44:54 PM	Helium valve closed
10/24/2010	4:44:54 PM	H2 valve closed
10/24/2010	4:44:55 PM	BCl3 valve closed
10/24/2010	4:44:55 PM	PH3 valve closed
10/24/2010	4:44:55 PM	SiCl4 pre valve closed
10/24/2010	4:44:55 PM	SiCl4 post valve closed
10/24/2010	4:44:55 PM	Main Vac valve closed
10/24/2010	4:44:55 PM	Bubbler valve closed
10/24/2010	4:44:55 PM	Bypass valve opened
10/24/2010	4:44:55 PM	Helium MFC set to  0.000000
10/24/2010	4:44:55 PM	H2 MFC set to  0.000000
10/24/2010	4:44:55 PM	BCl3 MFC set to  0.000000
10/24/2010	4:44:55 PM	PHl3 MFC set to  0.000000
10/24/2010	4:44:55 PM	SiCl4 MFC set to  0.000000
10/24/2010	4:44:55 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	4:44:55 PM	Tube furnace set to 0
10/24/2010	4:44:55 PM	Helium valve closed
10/24/2010	4:44:55 PM	H2 valve closed
10/24/2010	4:44:55 PM	BCl3 valve closed
10/24/2010	4:44:55 PM	PH3 valve closed
10/24/2010	4:44:55 PM	SiCl4 pre valve closed
10/24/2010	4:44:55 PM	SiCl4 post valve closed
10/24/2010	4:44:55 PM	Bubbler valve closed
10/24/2010	4:44:55 PM	Main Vac valve opened
10/24/2010	4:44:55 PM	Bypass valve opened
10/24/2010	4:44:55 PM	Helium MFC set to  0.000000
10/24/2010	4:44:55 PM	H2 MFC set to  0.000000
10/24/2010	4:44:55 PM	BCl3 MFC set to  0.000000
10/24/2010	4:44:55 PM	PHl3 MFC set to  0.000000
10/24/2010	4:44:55 PM	SiCl4 MFC set to  0.000000
10/24/2010	4:44:55 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	4:44:55 PM	Tube furnace set to 0
10/24/2010	4:44:55 PM	Run finished at 4:44 PM
10/24/2010	4:44:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/24/2010	4:45:08 PM	Helium MFC set to  100.000000
10/24/2010	4:45:09 PM	Helium valve opened
10/24/2010	4:45:09 PM	Helium valve closed
10/24/2010	4:45:10 PM	Helium valve opened
10/24/2010	4:52:21 PM	Helium valve closed
10/24/2010	4:52:23 PM	Helium MFC set to  0.000000
10/24/2010	4:53:11 PM	Helium MFC set to  100.000000
10/24/2010	4:53:12 PM	Helium valve opened
10/24/2010	5:09:04 PM	Helium valve closed
10/24/2010	5:09:06 PM	Helium MFC set to  0.000000
10/24/2010	5:09:55 PM	Recipe started at 5:09 PM
10/24/2010	5:09:55 PM	Helium valve closed
10/24/2010	5:09:55 PM	BCl3 valve closed
10/24/2010	5:09:55 PM	PH3 valve closed
10/24/2010	5:09:55 PM	SiCl4 pre valve closed
10/24/2010	5:09:55 PM	SiCl4 post valve closed
10/24/2010	5:09:55 PM	Main Vac valve closed
10/24/2010	5:09:55 PM	Bypass valve closed
10/24/2010	5:09:55 PM	Bubbler valve closed
10/24/2010	5:09:55 PM	H2 valve opened
10/24/2010	5:09:55 PM	Helium MFC set to  0.000000
10/24/2010	5:09:55 PM	H2 MFC set to  500.000000
10/24/2010	5:09:55 PM	BCl3 MFC set to  0.000000
10/24/2010	5:09:55 PM	PHl3 MFC set to  0.000000
10/24/2010	5:09:55 PM	SiCl4 MFC set to  0.000000
10/24/2010	5:09:55 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	5:09:55 PM	Tube furnace set to 1000
10/24/2010	5:11:15 PM	Helium valve closed
10/24/2010	5:11:15 PM	BCl3 valve closed
10/24/2010	5:11:15 PM	PH3 valve closed
10/24/2010	5:11:15 PM	SiCl4 pre valve closed
10/24/2010	5:11:15 PM	SiCl4 post valve closed
10/24/2010	5:11:15 PM	Main Vac valve closed
10/24/2010	5:11:15 PM	Bypass valve closed
10/24/2010	5:11:15 PM	H2 valve opened
10/24/2010	5:11:15 PM	Bubbler valve opened
10/24/2010	5:11:15 PM	Helium MFC set to  0.000000
10/24/2010	5:11:15 PM	H2 MFC set to  500.000000
10/24/2010	5:11:15 PM	BCl3 MFC set to  0.000000
10/24/2010	5:11:15 PM	PHl3 MFC set to  0.000000
10/24/2010	5:11:15 PM	SiCl4 MFC set to  0.000000
10/24/2010	5:11:15 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	5:11:15 PM	Tube furnace set to 1000
10/24/2010	5:31:15 PM	Helium valve closed
10/24/2010	5:31:15 PM	PH3 valve closed
10/24/2010	5:31:15 PM	Main Vac valve closed
10/24/2010	5:31:15 PM	Bypass valve closed
10/24/2010	5:31:15 PM	H2 valve opened
10/24/2010	5:31:15 PM	BCl3 valve opened
10/24/2010	5:31:15 PM	SiCl4 pre valve opened
10/24/2010	5:31:15 PM	SiCl4 post valve opened
10/24/2010	5:31:15 PM	Bubbler valve opened
10/24/2010	5:31:15 PM	Helium MFC set to  0.000000
10/24/2010	5:31:15 PM	H2 MFC set to  500.000000
10/24/2010	5:31:15 PM	BCl3 MFC set to  12.000000
10/24/2010	5:31:15 PM	PHl3 MFC set to  0.000000
10/24/2010	5:31:15 PM	SiCl4 MFC set to  50.000000
10/24/2010	5:31:15 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	5:31:16 PM	Tube furnace set to 1000
10/24/2010	5:44:36 PM	Helium valve closed
10/24/2010	5:44:36 PM	BCl3 valve closed
10/24/2010	5:44:36 PM	PH3 valve closed
10/24/2010	5:44:36 PM	SiCl4 pre valve closed
10/24/2010	5:44:36 PM	SiCl4 post valve closed
10/24/2010	5:44:36 PM	Main Vac valve closed
10/24/2010	5:44:36 PM	Bypass valve closed
10/24/2010	5:44:36 PM	H2 valve opened
10/24/2010	5:44:36 PM	Bubbler valve opened
10/24/2010	5:44:36 PM	Helium MFC set to  0.000000
10/24/2010	5:44:36 PM	H2 MFC set to  500.000000
10/24/2010	5:44:36 PM	BCl3 MFC set to  0.000000
10/24/2010	5:44:36 PM	PHl3 MFC set to  0.000000
10/24/2010	5:44:36 PM	SiCl4 MFC set to  0.000000
10/24/2010	5:44:36 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	5:44:36 PM	Tube furnace set to 750
10/24/2010	6:04:36 PM	H2 valve closed
10/24/2010	6:04:36 PM	BCl3 valve closed
10/24/2010	6:04:36 PM	PH3 valve closed
10/24/2010	6:04:36 PM	SiCl4 pre valve closed
10/24/2010	6:04:36 PM	SiCl4 post valve closed
10/24/2010	6:04:36 PM	Main Vac valve closed
10/24/2010	6:04:36 PM	Bypass valve closed
10/24/2010	6:04:36 PM	Helium valve opened
10/24/2010	6:04:36 PM	Bubbler valve opened
10/24/2010	6:04:36 PM	Helium MFC set to  500.000000
10/24/2010	6:04:36 PM	H2 MFC set to  0.000000
10/24/2010	6:04:36 PM	BCl3 MFC set to  0.000000
10/24/2010	6:04:36 PM	PHl3 MFC set to  0.000000
10/24/2010	6:04:36 PM	SiCl4 MFC set to  0.000000
10/24/2010	6:04:36 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	6:04:36 PM	Tube furnace set to 0
10/24/2010	6:24:36 PM	Helium valve closed
10/24/2010	6:24:36 PM	H2 valve closed
10/24/2010	6:24:36 PM	BCl3 valve closed
10/24/2010	6:24:36 PM	PH3 valve closed
10/24/2010	6:24:36 PM	SiCl4 pre valve closed
10/24/2010	6:24:36 PM	SiCl4 post valve closed
10/24/2010	6:24:36 PM	Main Vac valve closed
10/24/2010	6:24:36 PM	Bypass valve closed
10/24/2010	6:24:36 PM	Bubbler valve closed
10/24/2010	6:24:36 PM	Helium MFC set to  0.000000
10/24/2010	6:24:36 PM	H2 MFC set to  0.000000
10/24/2010	6:24:36 PM	BCl3 MFC set to  0.000000
10/24/2010	6:24:36 PM	PHl3 MFC set to  0.000000
10/24/2010	6:24:36 PM	SiCl4 MFC set to  0.000000
10/24/2010	6:24:36 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	6:24:36 PM	Tube furnace set to 0
10/24/2010	6:24:36 PM	Run finished at 6:24 PM
10/24/2010	6:25:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/24/2010	6:25:55 PM	Recipe started at 6:25 PM
10/24/2010	6:25:55 PM	H2 valve closed
10/24/2010	6:25:55 PM	BCl3 valve closed
10/24/2010	6:25:55 PM	PH3 valve closed
10/24/2010	6:25:55 PM	SiCl4 pre valve closed
10/24/2010	6:25:55 PM	SiCl4 post valve closed
10/24/2010	6:25:55 PM	Main Vac valve closed
10/24/2010	6:25:55 PM	Bypass valve closed
10/24/2010	6:25:55 PM	Bubbler valve closed
10/24/2010	6:25:55 PM	Helium valve opened
10/24/2010	6:25:55 PM	Helium MFC set to  500.000000
10/24/2010	6:25:55 PM	H2 MFC set to  0.000000
10/24/2010	6:25:55 PM	BCl3 MFC set to  0.000000
10/24/2010	6:25:55 PM	PHl3 MFC set to  0.000000
10/24/2010	6:25:55 PM	SiCl4 MFC set to  0.000000
10/24/2010	6:25:55 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	6:25:55 PM	Tube furnace set to 0
10/24/2010	6:25:56 PM	Helium valve closed
10/24/2010	6:25:56 PM	H2 valve closed
10/24/2010	6:25:56 PM	BCl3 valve closed
10/24/2010	6:25:56 PM	PH3 valve closed
10/24/2010	6:25:56 PM	SiCl4 pre valve closed
10/24/2010	6:25:56 PM	SiCl4 post valve closed
10/24/2010	6:25:56 PM	Main Vac valve closed
10/24/2010	6:25:56 PM	Bypass valve closed
10/24/2010	6:25:56 PM	Bubbler valve closed
10/24/2010	6:25:56 PM	Helium MFC set to  0.000000
10/24/2010	6:25:56 PM	H2 MFC set to  0.000000
10/24/2010	6:25:56 PM	BCl3 MFC set to  0.000000
10/24/2010	6:25:56 PM	PHl3 MFC set to  0.000000
10/24/2010	6:25:56 PM	SiCl4 MFC set to  0.000000
10/24/2010	6:25:56 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	6:25:56 PM	Tube furnace set to 0
10/24/2010	6:25:56 PM	Run finished at 6:25 PM
10/24/2010	6:25:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/24/2010	6:29:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/24/2010	6:29:55 PM	Recipe started at 6:29 PM
10/24/2010	6:29:55 PM	Helium valve closed
10/24/2010	6:29:55 PM	H2 valve closed
10/24/2010	6:29:55 PM	BCl3 valve closed
10/24/2010	6:29:55 PM	PH3 valve closed
10/24/2010	6:29:55 PM	SiCl4 pre valve closed
10/24/2010	6:29:55 PM	SiCl4 post valve closed
10/24/2010	6:29:55 PM	Main Vac valve closed
10/24/2010	6:29:55 PM	Bubbler valve closed
10/24/2010	6:29:55 PM	Bypass valve opened
10/24/2010	6:29:55 PM	Helium MFC set to  0.000000
10/24/2010	6:29:55 PM	H2 MFC set to  0.000000
10/24/2010	6:29:55 PM	BCl3 MFC set to  0.000000
10/24/2010	6:29:55 PM	PHl3 MFC set to  0.000000
10/24/2010	6:29:55 PM	SiCl4 MFC set to  0.000000
10/24/2010	6:29:55 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	6:29:55 PM	Tube furnace set to 0
10/24/2010	6:30:44 PM	Helium valve closed
10/24/2010	6:30:44 PM	H2 valve closed
10/24/2010	6:30:44 PM	BCl3 valve closed
10/24/2010	6:30:44 PM	PH3 valve closed
10/24/2010	6:30:44 PM	SiCl4 pre valve closed
10/24/2010	6:30:44 PM	SiCl4 post valve closed
10/24/2010	6:30:44 PM	Bubbler valve closed
10/24/2010	6:30:44 PM	Main Vac valve opened
10/24/2010	6:30:44 PM	Bypass valve opened
10/24/2010	6:30:44 PM	Helium MFC set to  0.000000
10/24/2010	6:30:44 PM	H2 MFC set to  0.000000
10/24/2010	6:30:44 PM	BCl3 MFC set to  0.000000
10/24/2010	6:30:44 PM	PHl3 MFC set to  0.000000
10/24/2010	6:30:44 PM	SiCl4 MFC set to  0.000000
10/24/2010	6:30:44 PM	Bypass solenoid MFC set to  0.000000
10/24/2010	6:30:44 PM	Tube furnace set to 0
10/24/2010	6:30:44 PM	Run finished at 6:30 PM
10/24/2010	6:30:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
